氮摻雜對DLC的表面形貌與光學效能的影響
摘要：本論文採用直流磁控濺射，以Ar或Ar與N2為工作氣體濺射高純石墨靶材製備了DLC及DLC:N薄膜。通過改變濺射功率，沉積氣壓和和工作氣體等實驗引數，以使得到的碳膜呈現出不同的表面形貌和效能；採用AFM、AES、FTIR、UV-VIS、橢偏儀等現代化測試手段，通過對薄膜巨集觀和微觀結構的分析，研究了製備工藝對DLC薄膜光學，以及電子化學鍵結構的影響,採用俄歇電子能譜CKLL的dN(E)/E計算了DLC及DLC:N薄膜的sp2和 sp3的.組分比率，得到以下結果：
（1）俄歇電子能譜AES 中, CKLL 俄歇譜可以用作表面碳的形式的指紋鑑別,用CKLL 俄歇譜和其價帶譜分析表徵表明所製備氫化薄膜表面具有類金剛石4面體sp3價鍵結構。
(2) 隨這工作氣體中氮氣含量的增加，薄膜的表面形貌變差，折射率變小, 而光學帶隙先增大後減小; 俄歇電子能譜(AES)表徵表明，1定量的氮的摻入穩定了sp2鍵的形成。
關鍵詞：DLC薄膜；氮摻雜；俄歇電子能譜；電子結構；光學帶隙；sp2鍵與sp3鍵比率
The effect of nitrogen doping on the opictical properties of diamond-like carbon
Abstract：Diamond-like carbon(DLC) films and DLC:N were prepared by DC reactive magnetron sputtering Ar or Ar and N2 as source gases separately, and pure graphite as a target . Based on this, different surface morphology and property of diamond like carbon films was deposited by controlling the deposition pressure,ambient pressure sputtering powers ，working gas and so on. The films studied by AFM,AES, UV-VIS, FTIRand ellipsometer to investigate property and electron structure of Diamond-like carbon films. Following conclusions can be made:
(1) The Auger electron spectroscopy( AES)CKLL can reflect electronic structure of DLC films deposited by DC sputtering of graphite in hydrogen have a diamond-like tetrahedral C-C bonding configuration as evidence by the fact that both the( AES)CKLL and the valence-band spectra are the same as for natural diamond.
(2) The results showed that the optical band gap first decreased and then increased with the increasing of N2 gas source. The refractive index changed in reverse order. the optical band gap and the refractive index reduced. It demonstrated that Nitrogen doping thin fims were benefited for formation of sp2 hybrid bonds and make optical band gap of thin film decreased .
Keyword：Diamond-like carbon films; nitrogen doping; AES;electronic structure;optical band gap; the ratio of sp2 and sp3
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